MaxSIM with height-controlled mirror (HCM)

Height-controlled mirror (HCM) 

Height Controlled Mirror
  • High-grade flat Si surface
  • 1 mm SiO2 coating
  • << 0.0001% smoothness of the ridge bottom
  • Ridge height 5 – 25 mm
  • Reusable

Not to Scale

HCM fabrication procedure

HCM Fabrication Procedure
Height Controlled Mirror

Chung. Patent pending
Gardeazabal et al. Submitted